Humidity sensors
Sensirion’s humidity and temperature sensors have established themselves as the market standard due to their best-inclass performance, high reliability, technology and price leadership. The SHT1x was the first digital, calibrated, reflow solderable humidity sensor (launched in 2001), marking the beginning of a new category of humidity sensors. Sensirion’s latest product innovations have set the market standard and opened up a wide range of new applications. Sensirion’s humidity and temperature and temperature-only products are based on Sensirion’s CMOSens® Technology, which combines the strengths of standard CMOS production processes and advanced MEMS technology on a single silicon chip. The temperature sensors are based on a silicon bandgap temperature sensor principle, while humidity is sensed using a capacitor. Its dielectric is realized via a polymer, which absorbs or desorbs water depending on the ambient humidity. The capacitive element is designed as an interdigitated structure of electrodes.